Porous Chuck Table
陶瓷真空吸盤
藉由金屬(或是陶瓷)底座以及特殊多孔質的陶瓷結合，內部精密氣導的設計，給予負壓時，可以將工件平滑穩固地吸附於真空吸盤上。
由於多孔質陶瓷的孔洞非常微細，能使工件表面貼合於真空吸盤時，不會因為負壓而造成表面的刮傷、凹陷等不良因素。
Through the combination of a metal (or ceramic) base and a special porous ceramic, the internal precision air conduction design allows the workpiece to be smoothly and firmly adsorbed to the vacuum chuck when negative pressure is applied.
陶瓷真空吸盤 氣浮載台 多孔質陶瓷真空吸盤
精密多孔質陶瓷區域吸附真空吸盤 透氣陶瓷真空吸盤
Porous Ceramic Chuck Table, Precise Porous Ceramic Partial Vacuum Chuck,
Air Flotation Platform, Porous Chuck Table, Precise Porous Ceramic Partial Vacuum Chuck,
Breathable ceramic vacuum suction cup
應用 Application
- 吸取平面工件專用陶瓷真空吸盤模組
- 吸附達一半面積後即不會破真空
- 適用於機台製作或工廠生產、組裝或自動化產業的乾淨環境
- 半導體晶圓吸盤，微小晶片設備產業，切割、研磨、清洗等。
- TFT-LCD、LED設備產業。
- 曝光機、玻璃切割機、玻璃基板氣浮搬運。
- 印刷電路板設備產業。
- 機械手臂搬運設備產業。
- Ceramic vacuum gripping module, special for gripping flat work piece.
- If gripping half of the area can be maintained, then the ceramic gripper won’t lose the work piece. Several work pieces can use same ceramic gripper.
- Best for clean environment of machine production or factory production, assemble and automation industry.
- Semiconductor wafer chuck, micro-chip equipment industry, cutting, grinding, cleaning, etc.
- TFT-LCD, LED equipment industry.
- Exposure machine, glass cutting machine, glass substrate air float handling.
- Printed circuit board equipment industry.
- Robot arm handling equipment industry.
特性 Features
- 耐磨耗佳：除具陶瓷堅硬特性，耐損耗、不易刮傷損壞。
- 不易分解及發塵：陶瓷屬於完全燒結、結構堅固穩定、不發塵。
- 輕量化：輕質材料且內部結構為均勻氣孔，重量極輕。
- 區域性吸附：可吸附大小不同的工件於同一陶瓷工作面上。
- 耐高溫、耐化學腐蝕性：陶瓷為高溫燒結產物，耐熱性佳且抗酸鹼程度佳，應用外圍廣。
- 電性能高：具絕緣、消散靜電特性(依材料)。
- 各種尺寸：任何形狀和大小都可以。
- Good wear resistance: In addition to the hard properties of ceramics, it is resistant to wear and tear and is not easily scratched.
- It is not easy to decompose and dust: ceramics are completely sintered, the structure is firm and stable, and no dust is generated.
- Lightweight: Lightweight material with a uniform internal pore structure and extremely light weight.
- Egional adhesion: It can absorb workpieces of different sizes on the same ceramic working surface.
- High temperature resistance and chemical corrosion resistance: ceramics are high-temperature sintered products, with good heat resistance and good acid and alkali resistance, and are widely used.
- High electrical performance: with insulation and static dissipation characteristics (depending on material).
- Various sizes: any shape and size are fine.
多孔陶瓷是通過陶瓷燒結技術其材料本身俱有許多孔的陶瓷，並且被用於真空吸盤。
最近，它被廣泛用作各種工業產品的基礎材料，例如過濾器，耐火材料，窯具，吸收器，吸聲劑，輕質結構材料，絕熱材料等。
尤其是它被用於高精度和高真空度的真空吸收技術。具有吸收超薄物體的性能，這是最近生產半導體，LED和顯示器所需的。
多孔陶瓷具有高孔隙率並保持高強度是非常重要的。特別是在最近成為一個問題的半導體和顯示工業領域中，多孔陶瓷應具有均勻的孔隙率和良好的表面粗糙度，以免損壞吸收對象。
多孔陶瓷具有高孔隙率是良好的，但是孔隙率越高，材料強度越低。另外，當孔隙密度低時，在相同孔隙率下孔隙率變低或孔徑變大。因此，低孔密度的材料也具有較低的強度。
Porous ceramics are ceramics whose materials have many pores through ceramic sintering technology, and are used for vacuum chucks.
Recently, it has been widely used as a basic material for various industrial products, such as filters, refractories, kiln furniture, absorbers, sound absorbers, lightweight structural materials, thermal insulation materials, etc.
Especially it is used in vacuum absorption technology with high precision and high vacuum. It has the ability to absorb ultra-thin objects, which is required for the recent production of semiconductors, LEDs and displays.
It is very important for porous ceramics to have high porosity and maintain high strength. Especially in the semiconductor and display industries that have recently become a problem, porous ceramics should have uniform porosity and good surface roughness so as not to damage the absorbing object.
It is good for porous ceramics to have high porosity, but the higher the porosity, the lower the material strength. In addition, when the pore density is low, the porosity becomes lower or the pore size becomes larger at the same porosity. Therefore, materials with low cell density also have lower strength.
